TERA LEADER / RESEARCH EQUIPMENT
OLED Evaporator
Vacuum deposition equipment for OLED materials
Development experience in vacuum deposition equipment for OLED materials. Current availability and scope require consultation.
Confirm the applicable model, options and final specifications before ordering.
Features
- OLED EVAPORATOR
Specifications
| Chamber | Stainless steel (EP) chamber |
|---|---|
| Chamber Dimension | 1324.5mm X 1124mm X 1742.5mm |
| Vacuum Pump | Turbo Pump (400l/s) & Rotary Vane Pump (400L/m) |
| Vacuum Gauge | Cold Cathode & Convection Gauge |
| Substrate | up to 4” O.D. / PCW Cooling Type |
| Deposition Source | Effusion cell 2ch, thermal 2ch (4ch) |
| System control | Semi auto control by Touch PC (TLP0105) |
| Safety | Alarm & Interlock |
Confirm the final model-specific specification and options before ordering.
Downloads
No public downloads are listed for this product. Contact us for applicable documents.