TERA LEADER / RESEARCH EQUIPMENT
OLED Evaporator
R&D equipment for vacuum deposition of OLED materials.
Equipment image
Specifications
- Chamber
- Stainless steel (EP) chamber
- Chamber Dimension
- 1324.5mm X 1124mm X 1742.5mm
- Vacuum Pump
- Turbo Pump (400l/s) & Rotary Vane Pump (400L/m)
- Vacuum Gauge
- Cold Cathode & Convection Gauge
- Substrate
- up to 4” O.D. / PCW Cooling Type
- Deposition Source
- Effusion cell 2ch, thermal 2ch (4ch)
- System control
- Semi auto control by Touch PC (TLP0105)
- Safety
- Alarm & Interlock
Research fields
- Advanced materials, thermal & surface processing, joining
Topics for technical consultation
- Target materials, sample characteristics and research objectives.
- Required functions, control and data integration.
- Installation conditions and target schedule.
Our R&D equipment pages present accumulated development experience. New requests are reviewed for technical fit, development scope and available resources before acceptance.
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